USING THE GREEN – RVACHEV’S QUASIFUNCTIONS METHOD IN THE NUMERICAL ANALYSIS OF ONE ELECTROSTATIC NANOELECTROMECHANICAL SYSTEM

The problem of numerical analysis one electrostatic nanoelectromechanical system is considered in the article. Nanoelectromechanical systems are miniature devices that combine electronic and mechanical components micro nano sizes. Electrostatic actuation such most common types used accelerometers, switches, micro-mirrors, micro-resonators, etc. disadvantages related to pull-in instability. This effect occurs when voltage applied moving electrode exceeds a critical value, causing lose its stationary configuration. A semi-linear elliptic equation with Laplace operator first boundary condition was for mathematical modeling process. To construct an approximate solution problem, it suggested use methods nonlinear semi-ordered spaces, particular, results V. I. Opoitsev on solvability equations heterotone operator. value reduced integral Urysohn’s using Green – Rvachev’s quasi-function method, which allows us expand application two-sided approximation method domains fairly arbitrary geometry. article substantiates possibility constructing approximations positive namely: computational scheme given, conditions convergence single under consideration obtained, error estimate obtained. illustrated by experiments rectangular domain. presented form graphical information.